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Piezo Assist Motor *

Piezo Assist Motor(PAM3-6.5 and PAM6-13)

  • Assist Motor is compact in size, and designed to have a high output force up to around 13N for PAM3-6.5 and around 29N for PAM6-13.
  • The output displacement is 6.5mm for PAM3-6.5 and 13mm for PAM6-13. The high displacement resolution is below 25nm~30nm while the travel velocity is above 1.5m/s.
  • The Piezo Assist Motor is designed user friendly for industrial, scientific research applications.
  • Applications include Microscope scanning, High resolution microscope, Biotechnology, Measurement technology, High speed throughput microscope, Mask/ Wafer positioning, Interferometer shape measurement and Micromanipulation.
  • Please use the designated Piezo Assist Motor Controller (PAMC-104)to drive the Piezo Assist Motor. A software and cable (2m) is attached to Piezo Assist Motor.

* “Piezo Assist” and “PiezoAssist” are registered trademarks of Mechano Transformer Corporation.


    Driving example (reference)

     PAM3-6.5   (weight 1.5kg   played at about 100x speed)

    PAM6-13   (Weight 3kg   played at about 1,000x speed)

    Product                                                                                                                                                                                 Price [円]
    PAM3-6.5 Piezo Assist Motor,  Travel range 6.5mm,  Minimum Movement 30nm,  Mounting Part φ6 shank 88,000
    PAM6-13 Piezo Assist Motor,  Travel range 13mm,  Minimum Movement 25nm,   Mounting Part φ95 shank 77,000
    PAMC-104 Piezo Assist Motor Controller,  Driving Axis 4,  RS232C Interface 132,000
    PAMC-100 Piezo Assist Motor Controller(remote control) 55,000
    PAMC4-485 A Piezo Assist Motor Controller,  Driving Axis 4,  RS485 Interface 132,000
    Tip shape Travel range Shank diameter Anodization process Controller Drawing Plan (PDF) Drawing Plan (.step)
    PAM6-13 Flat ±6.5mm φ9.5 (M9.5 x 0.5) Yes PAMC-104/ 485 A111 link
    PAM6-13R R Type ±6.5mm φ9.5 (M9.5 x 0.5) Yes PAMC-104/ 485 A112 link
    PAM6-13R-C R Type ±3mm φ9.5 (M9.5 x 0.5) Yes PAMC-104/ 485 A110 link
    PAM6-13R-C1 R Type ±4mm φ9.5 Yes PAMC-104/ 485 A113 link
    Tip shape Travel range Shank diameter Anodization process Controller Drawing Plan (PDF) Drawing Plan (.step)
    PAM6-13N Flat ±6.5mm φ9.5 (M9.5 x 0.5) No PAMC-104/ 485 A111 link
    PAM6-13RN R Type ±6.5mm φ9.5 (M9.5 x 0.5) No PAMC-104/ 485 A112 link
    PAM6-13R-CN R Type ±3mm φ9.5 (M9.5 x 0.5) No PAMC-104/ 485 A110 link
    PAM6-13R-C1 R Type ±4mm φ9.5 No PAMC-104/ 485 A113 link
    Tip shape Travel range Shank diameter Anodization process Controller Drawing Plan (PDF) Drawing Plan (.step)
    PAM3-6.5 Flat ±3mm φ6 Yes PAMC-104/ 485 A105 link
    PAM3-6.5R R Type ±3mm φ6 Yes PAMC-104/ 485 A104 link
    PAM3-6.5R-C1 R Type ±(3mm±0.2) φ5 Yes PAMC-104/ 485 A106 link
    Tip shape Travel range Shank diameter Anodization process Controller Drawing Plan (PDF) Drawing Plan (.step)
    PAM3-6.5N Flat ±3mm φ6 No PAMC-104/ 485 A105 link
    PAM3-6.5RN R Type ±3mm φ6 No PAMC-104/ 485 A104 link
    PAM3-6.5R-C1N R Type ±(3mm±0.2) φ5 No PAMC-104/ 485 A106 link

    # PAM's product code:

Piezo Assist Motor Operating Principal

Piezo assist motor rotates based on the inertial rotation mechanism inside the housing. This generates thrust and displacement in the direction of the screw shaft. As shown in Fig. 2, the inertial rotation mechanism principal diagram, the screw shaft work as a rotor. The screw shaft is connected to the moment of inertia (rotary knob, etc.). The screw shaft is hold by the contactor with stat-ic friction force. Therefore, no power consumption is needed to maintain the po-sition. When the piezoelectric actuator extends as shown in Fig. 2, contacts A and B move at an opposite direction to each other. An acceleration at contact A and B is created intentionally. The acceleration will take over the static fric-tion and generate a slippage between rotor and contact. The slippage resulted a rotational motion of the screw shaft. As a result, the screw shaft is moved in a thrust direction.


Piezo Assist Motor Catalogue >> Link

Dimension

Product PAM6-13 PAM6-13R PAM6-13R-C PAM6-13R-C1 PAM6-13N PAM6-13RN PAM6-13R-CN PAM6-13R-C1N PAM3-6.5 PAM3-6.5R PAM3-6.5R-C1 PAM3-6.5N PAM3-6 PAM3-6.5R-C1N
Minimum Movement (nm) 25 below 25 below 25 below 25 below 25 below 25 below 25 below 25 below 30 below 30 below 30 below 30 below 30 below 30 below
Maximum load capacity(N) 29.4 Above 29.4 Above 29.4 Above 29.4 Above 29.4 Above 29.4 Above 29.4 Above 29.4 Above 13 Above 13 Above 13 Above 13 Above 13 Above 13 Above
Maximum Drive Frequency(kHz) 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5
Maximum Speed(mm/min) 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above 1.5 Above
Amount of Coarse movement(mm) 13 Above( Maximum 18) 13 Above(Maximum 18) 5 Above(Maximum 7) 6 Above(Maximum 8) 13 Above(Maximum 18) 13 Above(Maximum 18) 5 Above(Maximum 7) 6 Above(Maximum 8) 6.5 Above(Maximum 9) 6.5 Above(Maximum 9) 4 Above(Maximum 6) 6.5 Above(Maximum 9) 6.5 Above(Maximum 9) 4 Above(Maximum 6)
Mounting Part(mm) M9x0.5 screw M9x0.5 screw M9x0.5 screw φ9.5 Shank M9x0.5 screw M9x0.5 screw M9x0.5 screw φ9.5 Shank φ6 Shank φ6 Shank φ5 Shank φ6 Shank φ6 Shank φ5 Shank
Dimension(mm) 61x32x15.1 63x32x15.1 52.5x32x15.1 47.5x32x15.1 61x32x15.1 63x32x15.1 52.5x32x15.1 47.5x32x15.1 41x21.6x8.2 43x21.6x8.2 37.2x21.6x7.2 41x21.6x8.2 43x21.6x8.2 37.2x21.6x7.2
Operating temperature 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃ 10~40℃
Storage Temperature 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃
Ambient Humidity 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation) 10~80%RH(No condensation)
Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector SMB Connector
life span 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above 1x109Above
Mass(kg) 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.02 0.02 0.02 0.02 0.02 0.02
Price(円) 77,000 77,000 77,000 77,000 77,000 77,000 77,000 77,000 88,000 88,000 88,000 88,000 88,000 88,000
User manual Download Download Download Download Download Download Download Download Download Download Download Download Download Download

外形図(単位:mm)

PAM3-6.5


ピエゾアシストモータPAM3-6.5 ピエゾアシストモータPAM3-6.5 外形図 メカノ







PAM6-13


ピエゾアシストモータPAM6-13ピエゾアシストモータPAM6-13 外形図







Dedicated cable(2m)

MTPAM-TSD-402SR

The Nano Alignment Stage Series is designed to construct an optical experimental system more quickly and easily. The MTPAM-TSD-402SR is an electrical driven XY axis stage which is ideal for positioning a load of 20kgf with resolution below 30nm. The optical experimental systems mentioned are mainly based on Michelson interferometer.


PDF Download   3D Model Download here

MTPAM-TSD-402SR

Stage Size 40×40mm
Piezo resolution < 20nm
Moment Stiffness / Pitch 0.5″/N・cm
Moment Stiffness / Yaw 0.46″/N・cm
Moment Stiffness / Roll 0.5″/N・cm
Guide Method Extended Contact Ball Bearing Guide
Travel Accuracy / Pitch 25"
Travel Accuracy / Yaw 15"
Travel Accuracy / Straightness 0.5μm
Running Parallelism 12μm
Travel ±6.5mm
Lead of Actuator 0.25mm
Max. Moment Capacity / Pitch 7.8N・m
Max. Moment Capacity / Yaw 5.0N・m
Max. Moment Capacity / Roll 7.8N・m
Weight 0.41Kg
Primary material Steel
Finish Super black chrome/Blue Anodized
Parallelism 30μm
Orthogonality 10μm

The Nano Alignment Stage Series is driven by Piezo Assist MotorⓇ. With Piezo Assist MotorⓇ, the nanometer order alignment can be easily realized. The stage can be electrically controlled or manually adjust. The backlash is smaller than the widely used manual stage.

MTPAM-TSD-402SRA 外形図 メカノ

MTPAM-TSD-602SR

The Nano Alignment Stage Series is designed to construct an optical experimental system more quickly and easily. The MTPAM-TSD-602SR is an electrical driven XY axis stage which is ideal for positioning a load of 35kgf with resolution below 30nm. The optical experimental systems mentioned are mainly based on Michelson interferometer.


PDF Download  3D Model Download here

MTPAM-TSD-602SR

Stage Size 60×60mm
Piezo resolution < 20nm
Moment Stiffness / Pitch 0.31″/N・cm
Moment Stiffness / Yaw 0.16″/N・cm
Moment Stiffness / Roll 0.13″/N・cm
Guide Method Extended Contact Ball Bearing Guide
Travel Accuracy / Pitch 25"
Travel Accuracy / Yaw 15"
Travel Accuracy / Straightness 0.5μm
Running Parallelism 12μm
Travel ±6.5mm
Lead of Actuator 0.25mm
Max. Moment Capacity / Pitch 13.2N・m
Max. Moment Capacity / Yaw 10N・m
Max. Moment Capacity / Roll 13.2N・m
Weight 0.91Kg
Primary material Steel
Finish Super black chrome/Blue Anodized
Parallelism 30μm
Orthogonality 10μm

The Nano Alignment Stage Series is driven by Piezo Assist MotorⓇ. With Piezo Assist MotorⓇ, the nanometer order alignment can be easily realized. The stage can be electrically controlled or manually adjust. The backlash is smaller than the widely used manual stage.

MTPAM-TSD-602SR 外形図 メカノ

MTPAM-TSD-603

The Nano Alignment Stage Series is designed to construct an optical experimental system more quickly and easily. The MTPAM-TSD-603 is an electrical driven Z axis stage which is ideal for positioning a load of 15kgf with resolution below 30nm. The optical experimental systems mentioned are mainly based on Michelson interferometer.


PDF Download  3D Model Download here

MTPAM-TSD-603

Stage Size 60×60mm
Piezo resolution 20nm
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Yaw -
Moment Stiffness / Roll 0.41″/N・cm
Guide Method Extended Contact Ball Bearing Guide
Travel Accuracy / Pitch -
Travel Accuracy / Yaw -
Travel Accuracy / Straightness 2.5μm
Running Parallelism 20μm
Travel ±5mm
Lead of Actuator 0.25mm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Yaw -
Max. Moment Capacity / Roll 6.9N・m
Weight 0.81Kg
Primary material Steel
Finish Black Matte/Blue Anodized
Parallelism 80μm

The Nano Alignment Stage Series is driven by Piezo Assist MotorⓇ. With Piezo Assist MotorⓇ, the nanometer order alignment can be easily realized. The stage can be electrically controlled or manually adjust. The backlash is smaller than the widely used manual stage.

MTPAM-TSD-603 外形図 メカノ

MTPAM-LMHB-30M

The Nano Alignment Mirror mounter Series is designed to construct an optical experimental system more quickly and easily. The MTPAM-LMHB-30M is a 2-axis electrical driven mirror mounter, which is ideal for constructing optical cavity and other optical experiment setup. The MTPAM-LMHB-30M can easily correct the misalignment of even less than 1.0mRad. These misalignments often occur in the optical experimental systems like gravitational wave detectors based on Michelson interferometer.


PDF Download  3D Model Download here

MTPAM-LMHB-30M


Save you from a lot of effort spent on alignment.

Type Kinematic
Adjustment Range /Tilt ±2.8°
Adjustment Range /Rotation ±2.8°
Resolution /Tilt 0.7µrad/rotation
Resolution /Rotation 0.7µrad/rotation
Weight 0.4Kg
Primary material Aluminum
Coarse Resolution /Tilt -
Coarse Resolution /Rotation -
Compatible Optics Diameter φ30mm
Compatible Optics Thickness 3 - 9mm
Fine Adjuster Indicator Conversion /Tilt -
Fine Adjuster Indicator Conversion /Rotation -
Fine Adjustment Range /Tilt -
Fine Adjustment Range /Rotation -
Finish Black Anodized/Blue Anodized

Automate your alignment with artificial intelligence like neural network or other algorithms.

The Nano Alignment Mirror mounter Series is driven by Piezo Assist MotorⓇ. With Piezo Assist MotorⓇ, the μ-1Rad order alignment can be easily realized. The mirror mounter can be electrically controlled. The backlash is smaller than the widely used manual mirror mounter.

MTPAM-LNMHB-30M外形図 メカノ

MTPAM-MHG-MP30-NL

The Nano Alignment Mirror mounter Series is designed to construct an optical experimental system more quickly and easily. The MTPAM-MHG-MP30-NL is a 2-axis electrical driven mirror mounter, which is ideal for constructing optical cavity and other optical experiment setup. The MTPAM-MHG-MP30-NL can easily correct the misalignment of even less than 1.0mRad. These misalignments often occur in the optical experimental systems like gravitational wave detectors based on Michelson interferometer

With the MTPAM-MHG-MP30-NL, you can build a self-alignment system for your optical setup to save you from a lot of effort spent on alignment. The alignment procedures can be easily automated with a program. The automation algorithm can be based on the artificial intelligence (like neural network) or others. To detect the misalignment, Wave Front Sensor (WFS) method is one of the conventional methods. By detecting the interference between the 00 and10 modes of the Hermite Gaussian mode, WFS method can controls the attitude of the mirror.


PDF Download  3D Model Download here

MTPAM-MHG-MP30-NL


Save you from a lot of effort spent on alignment.

Primary material Aluminum
Adjustment Range /Tilt ±3°
Adjustment Range /Rotation ±3°
Resolution /Tilt 0.7µrad/rotation
Resolution /Rotation 0.7µrad/rotation
Weight 0.17Kg
Number of Adjustment Axes 2 points
Compatible Optics Diameter φ30mm
Compatible Optics Thickness 3 - 5mm
Finish Black Anodized/Blue Anodized
2D Drawing download
Solid Model Download

The Nano Alignment Mirror mounter Series is driven by Piezo Assist MotorⓇ. With Piezo Assist MotorⓇ, the μ-1Rad order alignment can be easily realized. The mirror mounter can be electrically controlled. The backlash is smaller than the widely used manual mirror mounter.

Automate your alignment with artificial intelligence like neural network or other algorithms.

MTPAM-MHG-MP30-NL 外形図 メカノ

Application

(Application example of PAM6-13)To be attached to Piezo Assist Stage(Table Size 40x40mm, Table Size 60x60mm).

  • Microscope scanning
  • High resolution microscope
  • Biotechnology
  • Measurement technology
  • High speed throughput microscope
  • Mask/ Wafer positioning
  • Interferometer shape measurement
  • Micromanipulation






Piezo Assist Motor Operation Example

         Fig.1 and Fig.2 show the displacement vs characteristics of the Piezo Assist Motor driven at 40 pulses with drive frequencies of 1Hz and 5Hz. Fig.1 shows the data during forward
         rotation, and Fig.2 shows data during reverse rotation

  • At 1Hz, the displacement is stepped at 10~16nm/pulse, and the displacement is smooth at 5Hz.
  • The displacement for 40pulses is 480nm (average 12nm/pulse) in forward rotation for both 1Hz and 5Hz. They are 520nm(average 13nm/pulse) in reverse rotation.

Application example of Piezo Assist Mirror (Angle Adjustment of Mirror Holder )


  •    Ultra-fine resolution in Nanometer
  •   Holds position even when power is not supplied
  •   Movable angle range is ±3.5°(≒ ± 61mrad )
  •   1.6 μrad Ultra-precise adjustment by ( Over 70,000 steps)



Driving test video (reference)

Installation & Precautions

4. Installation & Precautions

  • A piezoelectric actuator does not know its own absolute position.
  • Do not touch the piezo-assisted motor as high voltage is present during operation.
  • Do not disassemble the piezo-assisted motor.
  • Do not use the piezo-assisted motor near flammable materials or in humid locations.
  • Do not apply power to the controller or piezo-assisted motor after subjecting them to shock.
  • When in operation, the piezo-assisted motor emits a high-pitched noise.

Controller and connection method

1. PAM3-6.5 or PAM6-13

2. PAMC-104 (Please Download the software here link)

Product PAMC-104
Number of Driving Axis 4
Maximum Driving Frequency (Hz) 1500
Interface RS232C
Power Supply Voltage (V) DC24
Current consumption (A)
Dimension (mm)(excluding protrusions) 200x162x50
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH (No condensation)
Weight (kg) 1.2
Price (円) 132,000
User manual Download

 

PAMC-104

ピエゾアシストモータコントローラPAM-RC104イメージ

ピエゾアシストモータコントローラPAM-RC104の外形図


Product Configuration

PAMC-104 Serial number Quantity
Body PAMC-104 1
Software installation CD PAM-SOFT-231213-001 1
user's manual PAM-DOC-MAN-231213-001 1
Attached communication cable PAM-CA-USB-DSUB9-1 1

Product Configuration

Serial number Quantity
(Sold separately) Power adapter MT-UNI345-2419-PL03B 1

 

4. PAM-RC100

Product PAM-RC100
Driving Frequency (Hz) 1500
Switchable channel number 4
Interface RS232C
Dimension (mm)(excluding protrusions) 102x78x30
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg) 0.32
Prices (円) 55,000
User manual Download

PAM-RC100(Sold separately)

ピエゾアシストモータコントローラPAM-RC100の外形図

Product Configuration

PAM-RC100 Serial number Quantity
Body PAM-RC100 1
Attached cable PAM-CA-DSUB9-DSUB9-2 1

 

3. PAMC4-485 A

Product PAMC4-485 A
Maximum Drive Frequency(Hz) 1500
Number of Control Axes 4
Number of channel switches 4
Interface RS485
Power supply voltage(V) DC24
Current Consumption(A)
Dimension (mm)(excluding protrusions) 200x162x50
Operating temperature 0~40℃
Storage temperature 0~40℃
Ambient Humidity 10~80%RH (No condensation)
Weight (kg) 1.2
Price (円) 132,000
User manual Download

 

PAMC4-485 A


 

Piezo Assist MotorⓇ Nanometer level alignment

Make your manual stage to nanometer positioning stage

Details:

By just replace the micrometer head with the Piezo Assist MotorⓇ, the manual stage is transform to:

  • higher resolution to below 30 nanometers
  • After positioning, the intended position can be maintained without power supply
  • from manual stage adjustment to electrical controlled precision stages
  • The merits of using Piezo Assist MotorⓇ

    ⇒Turn your manual stage to nanometer order positioning stage and electrically controlled precision stage

    Piezo Assist MotorⓇ is a piezoelectric driven actuator with a resolution of less than 30 nanometers. Manual stage can be transformed into nanometer order positioning stage and electrically controlled precision stage.

  • Easily realize the automation of your equipment
  • Easily achieves nanometer order precision of your equipment
  • Maintain at adjusted position even without power supply
  • Easily replaceable with micrometer head
  • Easily visualize the amount of movement by attaching an external sensor


  • Example

    1. Transform your manual stage to precision stage

    3-axis manual stage equipped with Piezo Assist MotorⓇ

    Example:Micromanipulator、Scanning microscope、High resolution microscope etc.


    2.Mirror Mount

    2-axis mirror mounter with Piezo Assist MotorⓇ

    Examples: Interferometer construction, Laser irradiation positioning, Laser welding etc.


    Some examples applications


    Operating precautions:

    1. A high voltage is applied to the Piezo Assist MotorⓇ during operation. Use only specified controllers such as PAMC-104 or PAMC4-485 to drive the motor.

    2. If you need to disconnect or plug in the cable from the Piezo Assist MotorⓇ or controller, turn off the power to the controller before doing so.

    3. Do not disassemble or modify the piezo assist motor or controller PAMC-104 or PAMC4-485 A S.

    4. Do not use the motor near flammable materials or damp or humid areas.

    5. If a strange odor, noise, overheating, or heat radiation is detected, please turn off the controller and check the situation.

    6. Do not turn on the driver after dropping the controller or subjecting it to impact.

    7. Do not touch the PAM during operation, as high voltages are applied during operation.

    8. If the Piezo Assist MotorⓇ moves to the threaded end, you can manually adjust the position by turning the adjustment knob.

    9. Piezo Assist MotorⓇ is an open loop device. If absolute position is required, a seperate external sensor must be provided, and a closed loop must be configured.

    10. During operation, the Piezo Assist MotorⓇ produces high pitch noise.

    11. You can prevent grease from sticking by moving the knob from one end to the other to redistribute the grease from time to time. If the motor is not used for a long time, the grease may become hard. In that case, you may be able to fix it by manually turning the knob from one end to the other.

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