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Piezo Assist Motor

Piezo Assist Motor(PAM3-6.5 and PAM6-13)

  • Assist Motor is compact in size, and designed to have a high output force up to around 13N for PAM3-6.5 and around 29N for PAM6-13.
  • The output displacement is 6.5mm for PAM3-6.5 and 13mm for PAM6-13. The high displacement resolution is below 25nm~30nm while the travel velocity is above 1.5m/s.
  • The Piezo Assist Motor is designed user friendly for industrial, scientific research applications.
  • Applications include Microscope scanning, High resolution microscope, Biotechnology, Measurement technology, High speed throughput microscope, Mask/ Wafer positioning, Interferometer shape measurement and Micromanipulation.
  • Please use the designated Piezo Assist Motor Controller (PAMC-104)to drive the Piezo Assist Motor. A software and cable (2m) is attached to Piezo Assist Motor.




Dedicated cable(2m)


Product Name PAM3-6.5 PAM6-13
Minimum Movement (nm) Below 30 Below 25
Maximum Load Capacity (N) Above 13 Above 29.4
Maximum Drive Frequency (Hz) 2000 2000
Moving Speed (mm/min) 1.5 1.5
Travel range (mm) Above 6.5(Maximum 9) Above 13(Maximum18)
Mounting Part (mm) φ6 shank M9x0.5 screw
Dimension (mm) 41x21.6x8.2 61x31x15.1
Operating Temperature 0~40℃ 0~40℃
Storage Temperature 0~40℃ 0~40℃
Ambient Humidity 10~80%RH(No condensation) 10~80%RH(No condensation)
Connector SMB connector SMB connector
Lifespan Above 1x109 pulse Above 1x109 pulse
Weight (kg) 0.02 0.05
Price ¥80,000 ¥70,000


(Application example of PAM6-13)To be attached to Piezo Assist Stage(Table Size 40x40mm, Table Size 60x60mm).

  • Microscope scanning
  • High resolution microscope
  • Biotechnology
  • Measurement technology
  • High speed throughput microscope
  • Mask/ Wafer positioning
  • Interferometer shape measurement
  • Micromanipulation

When attached to
Table Size 60x60mm
Piezo Assist Stage


  • Set an appropriate load (more than 3N is recommended) to improve the followability of the actuator body.
  • Please note that the speed and minimum movement varies depending on individual differences and the feed direction of the actuator.
  • It is possible to attach this product to your specified manual stage. Please contact us and let us know accordingly. We will try our best to meet your needs.
    However please be noted that depending on the specifications, additional machining or modification may be required.
  • Please use specified Piezo Assist Motor Controller(PAMC-104)for this product.

Piezo Assist Motor Controller(PAMC-104)

  • Piezo Assist Motor Controller is a designated controller to drive Piezo Assist Motor.
  • This product can operate the Piezo Assist Motor remotely with PC through RS-232C. By connecting the controller to PAM-RC100, the Piezo Assist Motor can be operated manually.
  • Please only use the attached cable for driving the Piezo Assist Motor.





Specifications PAMC-104
Number of Driving Axis 4
Maximum Driving Frequency (kHz) 2
Interface RS-232C
Power Supply Voltage (V) DC24
Current consumption (A)
(excluding protrusions)
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg) 1.2
Price ¥100,000


Product Name PAM-RC100
Driving Frequency (Hz) 0~2000
Switchable channel number 4
Interface RS-232C
Dimension (mm)
(excluding protrusions)
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg)
Price ¥40,000


  1. The power supply specification for this product is DC+24V2A.
  2. Please do not connect to other products besides Piezo Assist Motor.